NEN-EN-ISO 14644-10
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
inactive
| Organization: | NEN |
| Publication Date: | 1 March 2013 |
| Status: | inactive |
| Page Count: | 44 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
scope:
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
Document History
June 1, 2022
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules,...
NEN-EN-ISO 14644-10
March 1, 2013
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...
July 1, 2011
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...