NEN-EN-ISO 14644-6
Cleanrooms and associated controlled environments - Part 6: Vocabulary
inactive
| Organization: | NEN |
| Publication Date: | 1 November 2005 |
| Status: | inactive |
| Page Count: | 31 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
| ICS Code (Environment. Health protection. Safety (Vocabularies)): | 01.040.13 |
scope:
This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.
Document History
July 1, 2007
Cleanrooms and associated controlled environments - Part 6: Vocabulary
This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and...
NEN-EN-ISO 14644-6
November 1, 2005
Cleanrooms and associated controlled environments - Part 6: Vocabulary
This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and...