NEN-ISO 14606
Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
inactive, Most Current
| Organization: | NEN |
| Publication Date: | 1 November 2000 |
| Status: | inactive |
| Page Count: | 26 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
Gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
Document History
NEN-ISO 14606
November 1, 2000
Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
Gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a...