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JSA - JIS C 5630-3

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

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Organization: JSA
Publication Date: 20 March 2009
Status: active
ICS Code (Other semiconductor devices): 31.080.99

Document History

JIS C 5630-3
March 20, 2009
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
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References

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