DSF/FprEN 62047-5
Semiconductor devices - Micro-electromechanical devices -- Part 5: RF MEMS switches
| Organization: | DS |
| Status: | inactive |
| Page Count: | 35 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
scope:
This standard describes terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches. The statements made in this standardization are also applicable to RF MEMS switches with various structures, contacts (DC contact and capacitive contact), configurations (series and shunt), switching networks (SPST, SPDT, DPDT, etc.), and actuation mechanism such as electrostatic, electro-thermal, electromagnetic, piezoelectric, etc. The RF MEMS switches are promising devices in advanced mobile phones with multi-band/mode operation, smart radar systems, reconfigurable RF devices and systems, SDR phones, test equipments, tunable devices and systems, satellite, etc.
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