Safety of machinery – Electrical equipment of machines – Part 33: Requirements for semiconductor fabrication equipment
|Publication Date:||1 December 2009|
|ICS Code (Industrial robots. Manipulators):||25.040.30|
|ICS Code (Electrical engineering in general):||29.020|
|ICS Code (Safety of machinery):||13.110|
This part of IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
NOTE 1 In this standard, the term electrical includes electrical, electronic, and programmable electronic matters (i.e. electrical equipment means electrical, electronic, and programmable electronic equipment).
NOTE 2 In the context of this standard, the term person refers to any individual and includes those persons who are assigned and instructed by the user or his agent(s) in the installation, use, and care of the fabrication equipment in question.
The electrical equipment covered by this standard commences at the point of connection of the supply to the electrical equipment (see 5.1), and includes proper instruction for its safe installation.
NOTE 3 For the requirements for the electrical supply installation in buildings, see IEC 60364 series.
This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.
NOTE 4 Electrical equipment within which derived voltages exceed these supply voltage limits is within the scope of this standard.
Included are requirements for protective measures against electrical safety hazards as well as electrical interlock circuits that protect against non-electrical hazards. However, it does not cover all the requirements that are needed or required by other standards or regulations in order to safeguard persons from hazards other than electrical hazards (e.g. chemical hazards, mechanical hazards, radiation hazards). Each type of machine has unique requirements to be accommodated to provide adequate safety.
Additional and special requirements can apply to the electrical equipment of fabrication equipment that:
• use, process, or produce potentially explosive material;
• are used in potentially explosive and/or flammable atmospheres;
• have special risks when producing or using certain materials;
• are hoisting machines (which are covered by IEC 60204-32).
This standard does not include specifications for performance or functional characteristics of the fabrication equipment.
This standard does not deal with the possible effects on human health that can result from emissions (for example EMFs, noise) from the fabrication equipment.
This standard does not specify requirements for electromagnetic compatibility (EMC).