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ASTM F581

Standard Practice for Accelerated Aging of Photoresist

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Organization: ASTM
Publication Date: 1 January 1978
Status: inactive
Page Count: 2
scope:

1. Scope

1.1 This practice covers a method for accelerated aging of liquid photosensitive photoresists.

NOTE 1--Method F 583, Test Method for Photoresist Cleanness-Filterability can be used in conjunction with this practice to obtain a measure of the photoresist shelf life.

1.2 The values stated in SI units are to be regarded as the standard. The values in parentheses are for information only.

1.3 This standard does not purport to address the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazard statements see Section 7, Section X1.2, and paragraph 8.2.

Document History

ASTM F581
January 1, 1978
Standard Practice for Accelerated Aging of Photoresist
1. Scope 1.1 This practice covers a method for accelerated aging of liquid photosensitive photoresists. NOTE 1--Method F 583, Test Method for Photoresist Cleanness-Filterability can be used in...
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