DS/ENV 50218
Description of a parametrized European mini test chip
inactive, Most Current
| Organization: | DS |
| Publication Date: | 14 August 1997 |
| Status: | inactive |
| Page Count: | 24 |
| ICS Code (Integrated circuits. Microelectronics): | 31.200 |
scope:
This publication documents the parametrized MOS test structures of the device model Parameter extraction Test Chip (PTC) of the European Mini Test Chip (ETC). The devices of the PTC are a subset of the devices of the ETC. The modules of the ETC provide a minimum set of test structures used to characterize a MOS technology. The test structures of the ETC are generated automatically by a computer program for a given MOS technology.
Document History
DS/ENV 50218
August 14, 1997
Description of a parametrized European mini test chip
This publication documents the parametrized MOS test structures of the device model Parameter extraction Test Chip (PTC) of the European Mini Test Chip (ETC). The devices of the PTC are a subset of...