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DIN EN 62047-6

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010

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Organization: DIN
Publication Date: 1 July 2010
Status: active
Page Count: 17
ICS Code (Electromechanical components in general): 31.220.01
ICS Code (Semiconductor devices in general): 31.080.01

Document History

DIN EN 62047-6
July 1, 2010
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010
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