scope:

This Standard specifies the measurement methods for performance characteristics of turbomolecular pumps.

It is applicable to all types of turbomolecular pumps irrespective of sizes or types. For example, all turbomolecular pumps are covered regardless of the divisions shown below.

a) mechanical bearing (plain bearing/rolling bearing) and magnetic bearing

b) with or without drag pump stage

NOTE: The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows.

ISO 5302: 2003 Vacuum technology-Turbomolecular pumps-Measurement of performance characteristics (MOD)

In addition, symbols which denote the degree of correspondence in the contents between the relevant International Standard and JIS are IDT (identical), MOD (modified), and NEQ (not equivalent) according to ISO/ lEC Guide 21.