DIN 50451-2
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), Cobolt (Co), chromium (Cr), copper (Cu), iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy
inactive
| Organization: | DIN |
| Publication Date: | 1 January 2002 |
| Status: | inactive |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
April 1, 2003
Pruefung von Materialien fuer die Halbleitertechnologie - Bestimmung von Elementspuren in Fluessigkeiten - Teil 2: Calcium (Ca), Cobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe), Nickel (Ni) und Zink (Zn) in Flusssaeure mittels Plasma-angeregter Emissionsspektrometrie
A description is not available for this item.
DIN 50451-2
January 1, 2002
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), Cobolt (Co), chromium (Cr), copper (Cu), iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy
A description is not available for this item.
October 1, 1990
Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry
A description is not available for this item.
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