AENOR - UNE-EN 62047-6
Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 June 2010 |
| Status: | active |
| Page Count: | 19 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-6
June 1, 2010
Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)
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