AENOR - UNE-EN 62047-11
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 November 2013 |
| Status: | active |
| Page Count: | 23 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-11
November 1, 2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
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