AENOR - UNE-EN 62047-2
Semiconductor devices - Micro-electromechanical devices -- Part 2: Tensile testing method of thin film materials (IEC 62047-2:2006). (Endorsed by AENOR in January of 2007.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 January 2007 |
| Status: | active |
| Page Count: | 17 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-2
January 1, 2007
Semiconductor devices - Micro-electromechanical devices -- Part 2: Tensile testing method of thin film materials (IEC 62047-2:2006). (Endorsed by AENOR in January of 2007.)
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