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AENOR - UNE-EN 62047-3

Semiconductor devices - Micro-electromechanical devices -- Part 3: Thin film standard test piece for tensile testing (IEC 62047-3:2006) (Endorsed by AENOR in January of 2007.)

active, Most Current
Organization: AENOR
Publication Date: 1 January 2007
Status: active
Page Count: 12
ICS Code (Other semiconductor devices): 31.080.99

Document History

UNE-EN 62047-3
January 1, 2007
Semiconductor devices - Micro-electromechanical devices -- Part 3: Thin film standard test piece for tensile testing (IEC 62047-3:2006) (Endorsed by AENOR in January of 2007.)
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