AENOR - UNE-EN 62047-25
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Española de Normalización in January of 2017.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 January 2017 |
| Status: | active |
| Page Count: | 31 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-25
January 1, 2017
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Española de Normalización in January of 2017.)
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