AENOR - UNE-EN 62047-10
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 December 2011 |
| Status: | active |
| Page Count: | 15 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-10
December 1, 2011
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)
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