AENOR - UNE-EN 62047-26
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 June 2016 |
| Status: | active |
| Page Count: | 35 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-26
June 1, 2016
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)
A description is not available for this item.