AENOR - UNE-EN 62047-18
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials (Endorsed by AENOR in November of 2013.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 November 2013 |
| Status: | active |
| Page Count: | 17 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-18
November 1, 2013
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials (Endorsed by AENOR in November of 2013.)
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