AENOR - UNE-EN 62047-17
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)
active, Most Current
| Organization: | AENOR |
| Publication Date: | 1 August 2015 |
| Status: | active |
| Page Count: | 31 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
UNE-EN 62047-17
August 1, 2015
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)
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