DIN 50441-4
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 March 1999 |
| Status: | inactive |
| Page Count: | 8 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50441-4
March 1, 1999
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
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