DIN 50457-2
Testing of materials for semiconductor technology - Determination of the volume fraction of components in dopant gas mixtures by wet-chemical methods - Part 2: Phosphine in nitrogen phosphine mixtures
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 November 1999 |
| Status: | inactive |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50457-2
November 1, 1999
Testing of materials for semiconductor technology - Determination of the volume fraction of components in dopant gas mixtures by wet-chemical methods - Part 2: Phosphine in nitrogen phosphine mixtures
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