DIN 50445
Testing of materials for semiconductor technology; contactless determination of the electrical resistivity of semiconductor slices with the eddy current method; homogeneously doped semiconductor wafers
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 April 1992 |
| Status: | inactive |
| Page Count: | 4 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50445
April 1, 1992
Testing of materials for semiconductor technology; contactless determination of the electrical resistivity of semiconductor slices with the eddy current method; homogeneously doped semiconductor wafers
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