DIN 50441-5
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation
inactive
| Organization: | DIN |
| Publication Date: | 1 May 1998 |
| Status: | inactive |
| ICS Code (Electrical engineering (Vocabularies)): | 01.040.29 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
April 1, 2001
Pruefung von Materialien fuer die Halbleitertechnologie - Messung der geometrischen Dimensionen von Halbleiterscheiben - Teil 5: Begriffe zur Gestalts- und Ebenheitsabweichung
A description is not available for this item.
DIN 50441-5
May 1, 1998
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation
A description is not available for this item.
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