DIN IEC 62047-1
Semiconductor devices - Part 1: Microelectromechanical devices; Terms and definitions (IEC 47/1695A/CD:2003)
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 October 2003 |
| Status: | inactive |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Electronics (Vocabularies)): | 01.040.31 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
DIN IEC 62047-1
October 1, 2003
Semiconductor devices - Part 1: Microelectromechanical devices; Terms and definitions (IEC 47/1695A/CD:2003)
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