DIN 50437
Testing of semi-conductive inorganic materials; measuring the thickness of silicon epitaxial layer thickness by infrared interference method
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 June 1979 |
| Status: | inactive |
| Page Count: | 6 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50437
June 1, 1979
Testing of semi-conductive inorganic materials; measuring the thickness of silicon epitaxial layer thickness by infrared interference method
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