DIN 50441-2
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 2: Testing of edge profile
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 November 1998 |
| Status: | inactive |
| Page Count: | 5 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50441-2
November 1, 1998
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 2: Testing of edge profile
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