DIN 50434
Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 February 1986 |
| Status: | inactive |
| Page Count: | 9 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50434
February 1, 1986
Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces
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