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IEC 60050-523

AMENDMENT 1 International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical systems (MEMS)

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Organization: IEC
Publication Date: 1 October 2019
Status: active
Page Count: 8
ICS Code (Electrical engineering (Vocabularies)): 01.040.29
ICS Code (Other semiconductor devices): 31.080.99

Document History

IEC 60050-523
October 1, 2019
AMENDMENT 1 International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical systems (MEMS)
A description is not available for this item.
December 1, 2018
International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical devices
This part of IEC 60050 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in...
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