DIN 50441-3
Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 September 1985 |
| Status: | inactive |
| Page Count: | 5 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50441-3
September 1, 1985
Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference
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