ASTM International - ASTM E1162-11(2019)
Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
|Publication Date:||1 November 2019|
|ICS Code (Physicochemical methods of analysis):||71.040.50|
significance And Use:
5.1 This practice is used for reporting the experimental conditions as specified in Section 6 in the "Methods" or "Experimental" sections of other publications (subject to editorial... View More
5.1 This practice is used for reporting the experimental conditions as specified in Section 6 in the "Methods" or "Experimental" sections of other publications (subject to editorial restrictions).
5.2 The report would include specific conditions for each data set, particularly, if any parameters are changed for different sputter depth profile data sets in a publication. For example, footnotes of tables or figure captions would be used to specify differing conditions.View Less
1.1 This practice covers the information needed to describe and report instrumentation, specimen parameters, experimental conditions, and data reduction procedures. SIMS sputter depth profiles can be obtained using a wide variety of primary beam excitation conditions, mass analysis, data acquisition, and processing techniques (1-4).2
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.