CENELEC - EN 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
|Publication Date:||1 October 2010|
|ICS Code (Other semiconductor devices):||31.080.99|
This part of IEC 62047 describes generic specifications for
This part of IEC 62047 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.