DIN 50447
Testing of materials for semiconductor technology - Contactless determination of the electrical sheet resistance of semiconductor layers with the eddy-current method
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 April 1995 |
| Status: | inactive |
| Page Count: | 3 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50447
April 1, 1995
Testing of materials for semiconductor technology - Contactless determination of the electrical sheet resistance of semiconductor layers with the eddy-current method
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