DIN 50446
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 September 1995 |
| Status: | inactive |
| Page Count: | 12 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
DIN 50446
September 1, 1995
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers
A description is not available for this item.
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