DIN 50438-3
Testing of materials for use in semiconductor technology; determination of interstitial atomic boron and phosphorus content of silicon by infrared absorption spectroscopy
inactive
| Organization: | DIN |
| Publication Date: | 1 February 1984 |
| Status: | inactive |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
December 1, 2000
Determination ofimpurities in silicon intended for use in semiconductor technology by infrared absorption - Part 3: Determination of boron and phosphorus concentrations
A description is not available for this item.
DIN 50438-3
February 1, 1984
Testing of materials for use in semiconductor technology; determination of interstitial atomic boron and phosphorus content of silicon by infrared absorption spectroscopy
A description is not available for this item.
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