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ISO TS 24597

Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness

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Organization: ISO
Publication Date: 15 June 2011
Status: active
Page Count: 94
ICS Code (Optical equipment): 37.020
scope:

This Technical Specification specifies methods of evaluating the sharpness of digitized images generated by a scanning electron microscope (SEM) by means of a Fourier transform (FT) method, a contrast-to-gradient (CG) method and a derivative (DR) method.

Document History

ISO TS 24597
June 15, 2011
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
This Technical Specification specifies methods of evaluating the sharpness of digitized images generated by a scanning electron microscope (SEM) by means of a Fourier transform (FT) method, a...

References

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