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ASTM F143

Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension

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Organization: ASTM
Publication Date: 1 January 1973
Status: inactive

Document History

ASTM F143
January 1, 1973
Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension
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