ASTM P197
Proposed Test Method for Interstitial Oxygen Content of Silicon Slices Polished on Both Sides by Computer-Assisted Infrared Spectrophotometry
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| Organization: | ASTM |
| Publication Date: | 1 November 1986 |
| Status: | inactive |
| Page Count: | 6 |
Document History
ASTM P197
November 1, 1986
Proposed Test Method for Interstitial Oxygen Content of Silicon Slices Polished on Both Sides by Computer-Assisted Infrared Spectrophotometry
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