IEC 62047-5
Semiconductor devices – Micro-electromechanical devices – Part 5: RF MEMS switches
Organization: | IEC |
Publication Date: | 1 July 2011 |
Status: | active |
Page Count: | 74 |
ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 describes terminology, definition,
symbols, test methods that can be used to evaluate and determine
the essential ratings and characteristic parameters of RF MEMS
switches. The statements made in this standardization are also
applicable to RF (Radio Frequency) MEMS (Micro-Electro-Mecha
Document History

