BSI - BS EN 62047-10
Semiconductor devices - Micro-electromechanical devices Part 10: Micro-pillar compression test for MEMS materials
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| Organization: | BSI |
| Publication Date: | 30 September 2011 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS EN 62047-10
September 30, 2011
Semiconductor devices - Micro-electromechanical devices Part 10: Micro-pillar compression test for MEMS materials
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