AFNOR - NF EN 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4 : generic specifications for MEMS
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 1 September 2011 |
| Status: | active |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
NF EN 62047-4
September 1, 2011
Semiconductor devices - Micro-electromechanical devices - Part 4 : generic specifications for MEMS
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