AFNOR - NF EN 62047-8
Semiconductor devices - Micro-electromechanical devices - Part 8 : strip bending test method for tensile property measurement of thin films
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 1 October 2011 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-8
October 1, 2011
Semiconductor devices - Micro-electromechanical devices - Part 8 : strip bending test method for tensile property measurement of thin films
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