ISO 13067
Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size
| Organization: | ISO |
| Publication Date: | 1 November 2011 |
| Status: | inactive |
| Page Count: | 26 |
| ICS Code (Physicochemical methods of analysis): | 71.040.50 |
scope:
This International Standard describes procedures for measuring average grain size derived from a twodimensional polished cross-section using electron backscatter diffraction (EBSD). This requires the measurement of orientation, misorientation and pattern quality factor as a function of position in the crystalline specimen[1].
NOTE 1 While conventional methods for grain size determination using optical microscopy are well-established, EBSD methods offer a number of advantages over these techniques, including increased spatial resolution and quantitative description of the orientation of the grains.
NOTE 2 The method also lends itself to the measurement of the grain size of complex materials, for example those with a significant duplex content.
NOTE 3 The reader is warned to interpret the results with care when attempting to investigate specimens with high levels of deformation.
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