ISO DIS 23420
Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis
|Publication Date:||22 June 2020|
|ICS Code (Physicochemical methods of analysis):||71.040.50|
This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.