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ISO DIS 18114

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

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Organization: ISO
Publication Date: 3 July 2020
Status: active
Page Count: 10
ICS Code (Chemical analysis): 71.040.40
scope:

This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Document History

ISO DIS 18114
July 3, 2020
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is...
April 1, 2003
Surface Chemical Analysis - Secondary-Ion Mass Spectrometry - Determination of Relative Sensitivity Factors from Ion-Implanted Reference Materials
A description is not available for this item.

References

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