BSI - BS ISO 22278
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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| Organization: | BSI |
| Publication Date: | 31 August 2020 |
| Status: | active |
| Page Count: | 38 |
| ICS Code (Advanced ceramics): | 81.060.30 |
Document History
BS ISO 22278
August 31, 2020
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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