scope:

This part of ISO 25178 specifies generic procedures for the calibration, adjustment and verification of areal topography measuring instruments with planar rather than full 3D measurement behaviour and for the determination of measurement uncertainty components associated with effects on the metrological characteristics. It considers, what all areal instruments have in common, including. point sensing instruments with lateral scanning devices. For instrument specific principles, other parts may be developed in the 700 series of ISO standard 25178. In particular, the calibration of contacting systems with additional arcuate motion is not covered by this standard and may be described in a future revision of the ISO 25178-701.