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BSI - BS ISO 15632

Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

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Organization: BSI
Publication Date: 28 February 2021
Status: active
Page Count: 22
ICS Code (Other standards related to analytical chemistry): 71.040.99
ICS Code (Non-destructive testing): 19.100

Document History

BS ISO 15632
February 28, 2021
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
A description is not available for this item.
August 31, 2012
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
A description is not available for this item.
December 19, 2002
Microbeam analysis Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
A description is not available for this item.

References

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