IEC - TS 62607-6-9
Nanomanufacturing – Key control characteristics – Part 6-9: Graphene-based material – Sheet resistance: Eddy current method
| Organization: | IEC |
| Publication Date: | 1 February 2022 |
| Status: | active |
| Page Count: | 30 |
| ICS Code (Nanotechnologies): | 07.120 |
scope:
This part of IEC 62607 establishes a standardized method to determine the key control characteristic
• sheet resistance
for films of graphene-based materials by
• eddy current method.
With this method a coil-generated primary alternating electromagnetic field induces eddy currents in the conducting layer to be measured. The superposition of the primary field with the secondary field induced by the eddy currents is a function of the sheet resistance of the layer.
- The method is applicable for the contactless measurement of the sheet resistance of large area graphene layers on non-conductive substrates. As the method avoids any physical contact, it prevents any mechanical damage to the sensitive graphene layer. Therefore, the method is suitable for electrical characterization and quality control in an industrial fabrication environment.
- Due to the use of two detectors - one above the substrate and one below the substrate - the method is insensitive regarding small deviations from perfect flatness of the substrate.
- The range of graphene layers to be characterized comprises any quality, size and morphology of graphene crystallites. Hence, the applicability of this method spans from high quality, defect-free graphene layers to layers of dried graphene ink.
- The size of the graphene layers to be characterized includes layers larger than 25 mm × 25 mm for single point testing and 50 mm × 50 mm for imaging testing.
- The method can be used for layers of graphene-based material with a sheet resistance in the nominal range of 10 Ω/sq to 5 000 Ω/sq.
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