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ISO - 24688

Determination of modulation period of nano-multilayer coatings by lowangle X-ray methods

active, Most Current
Organization: ISO
Publication Date: 1 July 2022
Status: active
Page Count: 16
ICS Code (Surface treatment and coating in general): 25.220.01
scope:

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

Document History

24688
July 1, 2022
Determination of modulation period of nano-multilayer coatings by lowangle X-ray methods
This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for...
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