ISO - 24688
Determination of modulation period of nano-multilayer coatings by lowangle X-ray methods
| Organization: | ISO |
| Publication Date: | 1 July 2022 |
| Status: | active |
| Page Count: | 16 |
| ICS Code (Surface treatment and coating in general): | 25.220.01 |
scope:
This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
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